A Review of MEMS Based Piezoelectric Energy Harvester for Low Frequency Applications
نویسنده
چکیده
This paper presents a review of MEMS based piezoelectric energy harvesting for low frequency and low power applications. An introduction to MEMS and its components along with the concept of energy harvesting is presented. The paper also presents a device configuration of cantilever based basic components of MEMS energy harvesters, i.e. unimorph, bimorph. Results of different designs for MEMS energy harvesters are reviewed and presented.
منابع مشابه
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